Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates

Yanzhu Zhao; Xiaosong Wu; Yong Kyu Yoon; Jung Hwan Park; Stephen J. Kennedy; Zvi Schwartz; Barbara D. Boyan; Mark G. Allen

Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates

Yanzhu Zhao, Xiaosong Wu, Yong Kyu Yoon, Jung Hwan Park, Stephen J. Kennedy, Zvi Schwartz, Barbara D. Boyan, Mark G. Allen

Periodontics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper, three approaches to micromachined mold master structures for molding of a wafer-scale bone culturing platform are compared and contrasted. The processes investigated are a silicon deep-reactive ion etching (DRIE) process, an SU-8/polydimethylsiloxane(PDMS) process, and a multi-step SU-8 process. Upon comparison of the advantages and disadvantages of each approach, a wafer-scale implementation of bone cell culturing substrates is successfully demonstrated using the two-step SU-8 process, and successful duplication of hydrogels based on these molds is demonstrated.

Original language	English (US)
Title of host publication	American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Pages	169-175
Number of pages	7
State	Published - 2005
Event	2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005 - Orlando, FL, United States Duration: Nov 5 2005 → Nov 11 2005

Publication series

Name	American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Volume	7 MEMS
ISSN (Print)	1096-665X

Other

Other	2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005
Country/Territory	United States
City	Orlando, FL
Period	11/5/05 → 11/11/05

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering
Control and Systems Engineering

Cite this

Zhao, Y., Wu, X., Yoon, Y. K., Park, J. H., Kennedy, S. J., Schwartz, Z., Boyan, B. D., & Allen, M. G. (2005). Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates. In American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS (pp. 169-175). (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS; Vol. 7 MEMS).

Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates. / Zhao, Yanzhu; Wu, Xiaosong; Yoon, Yong Kyu; Park, Jung Hwan; Kennedy, Stephen J.; Schwartz, Zvi; Boyan, Barbara D.; Allen, Mark G.

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. 2005. p. 169-175 (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS; Vol. 7 MEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhao, Y, Wu, X, Yoon, YK, Park, JH, Kennedy, SJ, Schwartz, Z, Boyan, BD & Allen, MG 2005, Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates. in American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS, vol. 7 MEMS, pp. 169-175, 2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005, Orlando, FL, United States, 11/5/05.

Zhao Y, Wu X, Yoon YK, Park JH, Kennedy SJ, Schwartz Z et al. Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates. In American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. 2005. p. 169-175. (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS).

Zhao, Yanzhu ; Wu, Xiaosong ; Yoon, Yong Kyu ; Park, Jung Hwan ; Kennedy, Stephen J. ; Schwartz, Zvi ; Boyan, Barbara D. ; Allen, Mark G. / Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates. American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. 2005. pp. 169-175 (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS).

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abstract = "In this paper, three approaches to micromachined mold master structures for molding of a wafer-scale bone culturing platform are compared and contrasted. The processes investigated are a silicon deep-reactive ion etching (DRIE) process, an SU-8/polydimethylsiloxane(PDMS) process, and a multi-step SU-8 process. Upon comparison of the advantages and disadvantages of each approach, a wafer-scale implementation of bone cell culturing substrates is successfully demonstrated using the two-step SU-8 process, and successful duplication of hydrogels based on these molds is demonstrated.",

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AB - In this paper, three approaches to micromachined mold master structures for molding of a wafer-scale bone culturing platform are compared and contrasted. The processes investigated are a silicon deep-reactive ion etching (DRIE) process, an SU-8/polydimethylsiloxane(PDMS) process, and a multi-step SU-8 process. Upon comparison of the advantages and disadvantages of each approach, a wafer-scale implementation of bone cell culturing substrates is successfully demonstrated using the two-step SU-8 process, and successful duplication of hydrogels based on these molds is demonstrated.

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Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates

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