Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates

Yanzhu Zhao; Xiaosong Wu; Yong Kyu Yoon; Jung Hwan Park; Stephen J. Kennedy; Zvi Schwartz; Barbara D. Boyan; Mark G. Allen

Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates

Yanzhu Zhao, Xiaosong Wu, Yong Kyu Yoon, Jung Hwan Park, Stephen J. Kennedy, Zvi Schwartz, Barbara D. Boyan, Mark G. Allen

Periodontics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper, three approaches to micromachined mold master structures for molding of a wafer-scale bone culturing platform are compared and contrasted. The processes investigated are a silicon deep-reactive ion etching (DRIE) process, an SU-8/polydimethylsiloxane(PDMS) process, and a multi-step SU-8 process. Upon comparison of the advantages and disadvantages of each approach, a wafer-scale implementation of bone cell culturing substrates is successfully demonstrated using the two-step SU-8 process, and successful duplication of hydrogels based on these molds is demonstrated.

Original language	English (US)
Title of host publication	American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Pages	169-175
Number of pages	7
State	Published - 2005
Event	2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005 - Orlando, FL, United States Duration: Nov 5 2005 → Nov 11 2005

Publication series

Name	American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Volume	7 MEMS
ISSN (Print)	1096-665X

Other

Other	2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005
Country	United States
City	Orlando, FL
Period	11/5/05 → 11/11/05

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering
Control and Systems Engineering

Fingerprint Dive into the research topics of 'Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates'. Together they form a unique fingerprint.

Cite this

Zhao, Y., Wu, X., Yoon, Y. K., Park, J. H., Kennedy, S. J., Schwartz, Z., Boyan, B. D., & Allen, M. G. (2005). Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates. In American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS (pp. 169-175). (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS; Vol. 7 MEMS).

Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates. / Zhao, Yanzhu; Wu, Xiaosong; Yoon, Yong Kyu; Park, Jung Hwan; Kennedy, Stephen J.; Schwartz, Zvi; Boyan, Barbara D.; Allen, Mark G.

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. 2005. p. 169-175 (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS; Vol. 7 MEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhao, Y, Wu, X, Yoon, YK, Park, JH, Kennedy, SJ, Schwartz, Z, Boyan, BD & Allen, MG 2005, Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates. in American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS, vol. 7 MEMS, pp. 169-175, 2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005, Orlando, FL, United States, 11/5/05.

Zhao Y, Wu X, Yoon YK, Park JH, Kennedy SJ, Schwartz Z et al. Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates. In American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. 2005. p. 169-175. (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS).

Zhao, Yanzhu ; Wu, Xiaosong ; Yoon, Yong Kyu ; Park, Jung Hwan ; Kennedy, Stephen J. ; Schwartz, Zvi ; Boyan, Barbara D. ; Allen, Mark G. / Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates. American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. 2005. pp. 169-175 (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS).

@inproceedings{f825626aa2984fd4971fdd5cc01daeae,

title = "Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates",

abstract = "In this paper, three approaches to micromachined mold master structures for molding of a wafer-scale bone culturing platform are compared and contrasted. The processes investigated are a silicon deep-reactive ion etching (DRIE) process, an SU-8/polydimethylsiloxane(PDMS) process, and a multi-step SU-8 process. Upon comparison of the advantages and disadvantages of each approach, a wafer-scale implementation of bone cell culturing substrates is successfully demonstrated using the two-step SU-8 process, and successful duplication of hydrogels based on these molds is demonstrated.",

author = "Yanzhu Zhao and Xiaosong Wu and Yoon, {Yong Kyu} and Park, {Jung Hwan} and Kennedy, {Stephen J.} and Zvi Schwartz and Boyan, {Barbara D.} and Allen, {Mark G.}",

note = "Copyright: Copyright 2010 Elsevier B.V., All rights reserved.; 2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005 ; Conference date: 05-11-2005 Through 11-11-2005",

year = "2005",

language = "English (US)",

isbn = "079184224X",

series = "American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS",

pages = "169--175",

booktitle = "American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS",

}

TY - GEN

T1 - Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates

AU - Zhao, Yanzhu

AU - Wu, Xiaosong

AU - Yoon, Yong Kyu

AU - Park, Jung Hwan

AU - Kennedy, Stephen J.

AU - Schwartz, Zvi

AU - Boyan, Barbara D.

AU - Allen, Mark G.

PY - 2005

Y1 - 2005

N2 - In this paper, three approaches to micromachined mold master structures for molding of a wafer-scale bone culturing platform are compared and contrasted. The processes investigated are a silicon deep-reactive ion etching (DRIE) process, an SU-8/polydimethylsiloxane(PDMS) process, and a multi-step SU-8 process. Upon comparison of the advantages and disadvantages of each approach, a wafer-scale implementation of bone cell culturing substrates is successfully demonstrated using the two-step SU-8 process, and successful duplication of hydrogels based on these molds is demonstrated.

AB - In this paper, three approaches to micromachined mold master structures for molding of a wafer-scale bone culturing platform are compared and contrasted. The processes investigated are a silicon deep-reactive ion etching (DRIE) process, an SU-8/polydimethylsiloxane(PDMS) process, and a multi-step SU-8 process. Upon comparison of the advantages and disadvantages of each approach, a wafer-scale implementation of bone cell culturing substrates is successfully demonstrated using the two-step SU-8 process, and successful duplication of hydrogels based on these molds is demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=33646007011&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33646007011&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:33646007011

SN - 079184224X

SN - 9780791842249

T3 - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

SP - 169

EP - 175

BT - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

T2 - 2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005

Y2 - 5 November 2005 through 11 November 2005

ER -

Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates

Abstract

Publication series

Other

ASJC Scopus subject areas

Other files and links

Cite this