TY - GEN
T1 - Fabrication of micromachined mold masters for 3-D, high-aspect-ratio cell culturing substrates
AU - Zhao, Yanzhu
AU - Wu, Xiaosong
AU - Yoon, Yong Kyu
AU - Park, Jung Hwan
AU - Kennedy, Stephen J.
AU - Schwartz, Zvi
AU - Boyan, Barbara D.
AU - Allen, Mark G.
N1 - Copyright:
Copyright 2010 Elsevier B.V., All rights reserved.
PY - 2005
Y1 - 2005
N2 - In this paper, three approaches to micromachined mold master structures for molding of a wafer-scale bone culturing platform are compared and contrasted. The processes investigated are a silicon deep-reactive ion etching (DRIE) process, an SU-8/polydimethylsiloxane(PDMS) process, and a multi-step SU-8 process. Upon comparison of the advantages and disadvantages of each approach, a wafer-scale implementation of bone cell culturing substrates is successfully demonstrated using the two-step SU-8 process, and successful duplication of hydrogels based on these molds is demonstrated.
AB - In this paper, three approaches to micromachined mold master structures for molding of a wafer-scale bone culturing platform are compared and contrasted. The processes investigated are a silicon deep-reactive ion etching (DRIE) process, an SU-8/polydimethylsiloxane(PDMS) process, and a multi-step SU-8 process. Upon comparison of the advantages and disadvantages of each approach, a wafer-scale implementation of bone cell culturing substrates is successfully demonstrated using the two-step SU-8 process, and successful duplication of hydrogels based on these molds is demonstrated.
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M3 - Conference contribution
AN - SCOPUS:33646007011
SN - 079184224X
SN - 9780791842249
T3 - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
SP - 169
EP - 175
BT - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
T2 - 2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005
Y2 - 5 November 2005 through 11 November 2005
ER -