Evolution of micromachined pressure transducers for cardiovascular applications

Peter Starr, Keith Bartels, Mauli Agrawal, Steven R Bailey

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Since their inception in the middle of the 20th century, micromachined pressure sensors have downscaled several orders of magnitude. Transducing diaphragms have reduced in length from over 1 cm to less than 100 μm, and have reduced in thickness from hundreds of microns to about 1 μm or less. Here, the evolution of these micromachined pressure sensors is reviewed, with a focus on miniaturization for cardiovascular applications. This paper describes the eras of micromachining which contributed to progressive miniaturization, including early developments, early and late bulk micromachining, and surface micromachining. Characteristic microfabrication techniques and representative sensors per era are detailed. Then, an outlook is given on the future of miniaturization and current strategies to achieve it. Finally, the application of micromachined transducers into the modern repertoire of blood pressure sensing devices is covered, along with key packaging issues which may limit overall device size and function.

Original languageEnglish (US)
Pages (from-to)8-19
Number of pages12
JournalSensors and Actuators, A: Physical
Volume225
DOIs
StatePublished - Apr 15 2015
Externally publishedYes

Fingerprint

Pressure transducers
Micromachining
Pressure sensors
miniaturization
pressure sensors
micromachining
Surface micromachining
Microfabrication
Blood pressure
Diaphragms
Transducers
blood pressure
Packaging
diaphragms
packaging
Sensors
transducers
sensors

Keywords

  • Cardiovascular sensing
  • Downscaling
  • Micromachining
  • Miniaturization
  • Minimally invasive
  • Pressure transducers

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Instrumentation

Cite this

Evolution of micromachined pressure transducers for cardiovascular applications. / Starr, Peter; Bartels, Keith; Agrawal, Mauli; Bailey, Steven R.

In: Sensors and Actuators, A: Physical, Vol. 225, 15.04.2015, p. 8-19.

Research output: Contribution to journalArticle

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